Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2009
Session ID : 2A19
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Host: The Ceramic Society of Japan

Preparation and microstructure of LiTaO3 thin films on Sapphire substrate by MOCVD
*Tsubasa Ono, He Zhanbing, Naoki Wakiya, Tomohiko Yoshioka, Junzo Tanaka, Setter Nava, Kazuo Shinozaki
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Keywords: CVD, Lithium Tantalate, epitaxial, TEM, microstructure
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[in Japanese]
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© The Ceramic Society of Japan 2009
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