Abstract
The 1-D photonic crystal composed of Multilayered Epitaxial film was fabricated using RF magnetron sputtering. Barium Strontium titanate ((Ba,Sr)TiO3) and magnesium oxide (MgO) layers with the thickness of about 40-80 nm were alternately deposited. The thickness of each layer was estimated by stylus surface profile measurement and ellipsometry measurement, and then the optimal sputtering times of SrTiO3 and MgO were determined. For the 1-D photonic crystal with 8 layers, the photonic band gap was successfully observed using a visible light spectrometer. Likewise, Strontium titanate (SrTiO3) and MgO multilayers were fabricated and measured.
