Host: The Ceramic Society of Japan
Recently, a high-performance gas sensor which can detect flammable gases such as H2 with high sensibility is required. On the other hand, the electrophoretic deposition (EPD) process is known as a simple and easy process for preparing a porous thin film on a complex formed substrate. In this study, in order to fabricate a combustion type high-performance gas sensor, the porous titania thin films loading Pd and Pt fine particles were prepared by using an EPD and a subsequent photo deposition process. The microstructure and the sensor characteristic to H2 gas of the obtained porous titania thin films were examined.
