Fabrication and characterization analysis of transparent conducting oxide (TCO) films on the nanopatterned glass substrates.

Abstract

In this work, we fabricated transparent conducting oxide (TCO) thin films on the nanopatterned glass substrates by pulsed laser deposition (PLD) and characterized their morphologic, crystallographic and electrical properties in order to develop the novel transparent conducting electrodes for high-performance solar cells or display. The nanopatterned glass substrates were prepared using a thermal nanoimprint technique. TCO thin films on these nanopatterned glass substrates are expected to be lower resistivity due to high crystallinity via homogenization of crystal nucleation sites along the nanopattern.