Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2009
Session ID : 2P113
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Host: The Ceramic Society of Japan

Development of oxidation-resistant films on thermoelectric magnesium silicide
*JUNICHI TANI, MASANARI TAKAHASHI, HIROYASU KIDO
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Keywords: magnesium silicide, FeSi2, oxidation-resistant film, thermoelectric material
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Abstract
Mg2X (X=Si, Ge, and Sn) and their solid solutions have been considered as candidates for high-performance thermoelectric materials. We have fabricated oxidation-resistant FeSi2 films on sintered Mg2X by RF magnetron sputtering in order to improve the oxidation resistance of Mg2X. The sputtering condition was investigated in detail to optimize the thickness of FeSi2 thin film. The thermoelectric Mg2X materials coated by FeSi2 thin film show good oxidation resistance.
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© The Ceramic Society of Japan 2009
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