Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2009
Session ID : 2P161
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Host: The Ceramic Society of Japan

Characterization of ZnO:Al thin films prepared by electric current heating
*Yasuhiro Ibaraki, Naoki Adachi, Takayuki Honma, Takumi Hagizawa, Masasuke Takata
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Keywords: Zinc Oxide, Electric Current Heating Method, Transparent Conductive Films
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Abstract
Transparent conductive aluminum doped zinc oxide (ZnO:Al) films were deposited on glass substrates by electric current heating in vacuum. The structural, electrical and optical properties were investigated. The lowest resistivity of the ZnO:Al films was 2.7*10-4 ohmcm and the average transmittance of the films was about 90% in the visible range.
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© The Ceramic Society of Japan 2009
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