Efficient and precision machining of Si₃N₄

Abstract

Silicon nitride (Si₃N₄) ceramics is used for machine components such as rolling bearings and glow plugs. In addition, Si₃N₄ is used in producing processes of aluminum (Al) parts by casting because of its high thermostability and hardness. However, Si₃N₄ is a hard-to-machine material and it is required to machine efficiently and precisely such a hard and brittle material. We used a unique grinding method called "electrolytic in-process dressing" (ELID) for efficient and precise machining. In this research, we conducted efficient and precise grinding of Si₃N₄ ceramics and investigated its surface properties.