The Effect of the Dy Substitution of NdFeB Thin Film Magnet on Si Substrate

Abstract

The Dy substitution of the NdFeB thin film on Si substrate was investigated for the purpose of the increment of the Coercive force. The amorphous films were prepared by RF sputtering technique, then, the films were crystallized by the infrared light in the vacuum atmosphere. In comparison with the NdFeB films, the Dy substituted film showed both perpendicular magnetic anisotropy and high Coercive force, which is considered to be due to the increment of the anisotropy magnetic field of the films.