Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2009
Session ID : 3C17
Conference information

Host: The Ceramic Society of Japan

Measurement and control of residual stress of epitaxial (001)YSZ thin films deposited on Si substrates
*Akihiro Murakami, Naoki Wakiya, Tomohiko Yoshioka, Junzo Tanaka, Kazuo Shinozaki
Author information
Keywords: YSZ, epitaxial, thin film, PLD, residual stress, reciprocal space mapping
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract
[in Japanese]
Content from these authors
© The Ceramic Society of Japan 2009
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top