Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2009
Session ID : 3I23
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Host: The Ceramic Society of Japan

Preparation of oxide thin films by a coplanar plasma discharge technique
*Yoshihiro Shibayama, Masahiro Shikatani, Keigo Nabeta, Yosuke Sonohara, Masayuki Okuya
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Keywords: Surface discharge, Plasma, Oxide thin film, Zinc oxide
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[in Japanese]
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© The Ceramic Society of Japan 2009
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