Abstract
Recently, a high-performance gas sensor which can detect flammable gases such as H2, alcohols with high sensibility is required. The size of such sensor has to be small, either. In this study, in order to fabricate a combustion type small gas sensor with good response to the flammable gases, the titania thin films loading Pd and Pt fine particles were prepared on a glass capillary by using a sol-gel and a subsequent photo deposition process. The property and the sensibility against H2 and alcohol gases of the obtained titania thin films were examined.
