Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2010
Session ID : 1L29
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Low temperature processing of HfO2 thin films by UV-assisted chemical solution process
*Kazuyuki SuzukiKazumi Kato
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CONFERENCE PROCEEDINGS FREE ACCESS

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[in Japanese]
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© The Ceramic Society of Japan 2010
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