Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
24th Fall Meeting of The Ceramic Society of Japan
Session ID : 1A26
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Host: The Ceramic Society of Japan

Formation of Siliceous Film on Various Polymer Substrates by Vacuum Ultraviolet Irradiation and Their Evaluation
*Shoto Arai, Kiyoshi Itatani, Seiichiro Koda
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Keywords: VUV, polymer substrate, siliceous film, silane coupling agent
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[in Japanese]
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© The Ceramic Society of Japan 2011
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