Abstract
When Nb-doped TiO2 thin film was annealed in reduction condition, the film become a conductor. But the sheet resistance of this thin film depends on the preparing condition of this thin film. In this study, Structure analysis of Nb-doped TiO2 thin film was conducted by using Ti K-edge XANES measurement. The spectrum of Nb-doped TiO2 thin film which shows large sheet resistance is similar to the spectrum of commercial TiO2 powder. On the other hand, the spectrum of Nb-doped titanium oxide thin film which shows small sheet resistance is different from the spectrum of commercial TiO2 powder. And this result indicates that this film contains the oxygen defects.
