Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
24th Fall Meeting of The Ceramic Society of Japan
Session ID : 1R16
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Host: The Ceramic Society of Japan

Development of lead-free (K,Na)NbO3 piezoelectric films deposited by sputtering
*Kenji Shibata, Kazufumi Suenaga, Kazutoshi Watanabe, Fumimasa Horikiri, Akira Nomoto, Tomoyoshi Mishima
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Keywords: piezoelectric, thin film, lead-free, KNN
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[in Japanese]
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© The Ceramic Society of Japan 2011
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