Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
24th Fall Meeting of The Ceramic Society of Japan
Session ID : 1B22
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Host: The Ceramic Society of Japan

Contribution of F scavengers to deposition process in the liquid phase deposition method
*Minoru Mizuhata, Hirotaka Ikuta, Yuki Mori
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Keywords: Liquid phase deposition, Metal fluoro-complex, Layered double hydroxide, Nickel hydroixde, Titanium-iron oxide
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Abstract
Various F- scavenger was applied to the equilibrium reaction of metal fluorocomplex for LPD reaction process. Free F- Comcentration decreased with the reaction time for more than 40 hours and depended on the equilibrium constant. TiO2 thin film was deposited using Fe(NO3)3 solution as the F- scavenger. Composition of deposited films depends on the Fe(NO3)3 and anatase and FeOF were obtained.
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© The Ceramic Society of Japan 2011
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