Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
24th Fall Meeting of The Ceramic Society of Japan
Session ID : 2D08
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Host: The Ceramic Society of Japan

Relationship between the heat-treatment temperature and in-plane residual stress for YSZ thin films prepared on Si(100) substrates by sol-gel method
*Hiromitsu Kozuka, Kentaro Ohno, Hiroaki Uchiama
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Keywords: thin film, stress, sol-gel method, coating, YSZ, residual stress
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[in Japanese]
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© The Ceramic Society of Japan 2011
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