Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
24th Fall Meeting of The Ceramic Society of Japan
Session ID : 2D17
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Host: The Ceramic Society of Japan

Effect of lattice defects of ceria abrasives on polishing glasses
*Seiichi SUDA, Takayuki HONMA, Koichi KAWAHARA, Kumiko KINOSHITA, Nobuki OZAWA, Momoji KUBO
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Keywords: glass polishing, ceria abrasive, chemical mechanical polishing, lattice defects
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[in Japanese]
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© The Ceramic Society of Japan 2011
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