24th Fall Meeting of The Ceramic Society of Japan
Session ID : 2E08
Conference information
Host: The Ceramic Society of Japan
TEM microstructure analysis for stressed Pb(Zr,Ti)O3 thin firms by LaNiO3 bottom electrodes
*Kotaro Ozawa, Masaaki Ishizuka, Naonori Sakamoto, Takanori Kiguchi, Toyohiko Konno, Naoki Wakiya, Hisao Suzuki
Author information
Keywords:
ferroelectric,
thin film,
Chemical solution deposition method,
residual stress,
transmission electron microscope
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