Abstract
Silsesquioxane-titania hybrid films were prepared from phenyltriethoxysilane (PhTES), methyltriethoxysilane (MTES) and titanium tetrabutoxide (Ti(O-n-Bu)4) by sol-gel method on soda-lime-silicate glass substrate. UV light irradiation stimulated structural changes of the cleavage of Si-C bonds by photocatalytic activity of the TiO2 component during UV irradiation. Characterization of hybrid films were examined using fourier transformed infrared spectrophotometer, UV-visible spectrophotometer, 29Si MAS-NMR spectra and a nanoindentation test. The Meyer hardness of the hybrid films increased with the increase of UV irradiation time. On the basis of changes in films properties, the silsesquioxane-titania hybrid films were promising for micropatterning process.
