Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
24th Fall Meeting of The Ceramic Society of Japan
Session ID : 2N22
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Host: The Ceramic Society of Japan

Preparation of oxide films under ambient pressure by a surface discharge technique
*Toshimichi Hanai, Masahiko Iyoda, Keigo Nabeta, Masayuki Okuya
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Keywords: surface discharge, plasma, zinc oxide, transparent conductive oxide film
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[in Japanese]
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© The Ceramic Society of Japan 2011
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