Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
24th Fall Meeting of The Ceramic Society of Japan
Session ID : 2PE06
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Host: The Ceramic Society of Japan

Effect of supercritical carbon dioxide treatment on synthesis of sol-gel derived silicon dioxide thin film
*Saaya Narishige, Hiroshi Uchida, Seiichiro Koda
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Keywords: silicon dioxide, sol-gel, thin film, supercritical fluid, carbon dioxide
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[in Japanese]
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© The Ceramic Society of Japan 2011
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