Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
24th Fall Meeting of The Ceramic Society of Japan
Session ID : 3A17
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Host: The Ceramic Society of Japan

Structure and properties of PMMA-silica hybrid thin films prepared using perhydropolysilazane as silica source
*Koji Nakajima, Hiroaki Uchiyama, Hiromitsu Kozuka
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Keywords: organic-inorganic hybrid, thin film, PMMA, silica, polysilazane, perhydropolysilazane
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[in Japanese]
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© The Ceramic Society of Japan 2011
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