Abstract
We report a simple method for fabricating nanostructures on glass by using a nanoimpirnt film with hole pattern. Before filling silica beads into the holes of the film, the hydrophilicity of the film was apparently improved by UV O3 treatment. By dropping a small amount of the aqueous solution containing silica beads onto the film, silica beads were filled into the hole pattern. After putting the film on a glass substrate in a furnace, heat treatment was carried out. It was found that pattern transfer of nanostructures which consisted of silica beads was successfully achieved on the glass. These results indicate that this simple method is a promising candidate for fabrication of large-area nanostructure on glass.