Abstract
The microstructural characterization of a GdBa2Cu3Oy (GdBCO) layer fabricated by in-plume PLD method was performed by TEM and an FIB-SEM dual beam system. Numerous outer-growth grains form on the GdBCO surface. These grains were identified by electron beam diffraction. In addition, a 3D reconstructed image of the GdBCO layer using the FIB-SEM dual-beam system clearly shows the distribution of those outer-growth grains.