Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2011
Session ID : 1K29
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Host: The Ceramic Society of Japan

Estimation of residual stress in polycrystalline 3C-SiC film using micro-Raman spectroscopy
*Tomonori Uchimaru, Seiichi Fukuoka, Kazunori Yamazaki
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Keywords: raman, stress
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[in Japanese]
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© The Ceramic Society of Japan 2011
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