Abstract
The Nd-Fe-B thin film magnet has been investigated in order to the application of the micro motor and actuator of the MEMS devices. The thin films were synthesized by the RF sputtering and the post annealing technique. The amorphous films of Nd-Fe-B were first deposited at the substrate temperature of 300 degrees C or 450 degrees C, then the films were annealed at 650 degrees C. The Nd-Fe-B films deposited at the substrate temperature of 450 degrees C, showed perpendicular magnetic anisotropy and coercivity value from 6.5kOe to 11.2kOe. The different magnetic properties were analyzed from the point of view of the grain size and the existing of the non-magnetic phase.
