Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2011
Session ID : 2P151
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Nanoscale elemental mappings of Cr-Si-N-O thin films
*Jun ShirahataAoi SatoKazuma SuzukiFumiya SekiguchiTsuneo SuzukiTadachika NakayamaHisayuki SuematsuKoichi NiiharaHiroki Asami
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[in Japanese]
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© The Ceramic Society of Japan 2011
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