Annual Meeting of The Ceramic Society of Japan, 2011
Session ID : 2P190
Conference information
Host: The Ceramic Society of Japan
Fabrication of highly c-axis oriented silicon nitride
*takumi yachi, Satoshi Tanaka, Takuma Takahahi, Ryoichi Hurushima, Zenzi Kato, keizo Uematsu
Author information
Keywords:
silicone nitride,
crystalline orientation
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