Fabrication of PZT thick films using the mixture of alkoxide solution and amorphous powder with PZT compositions

Abstract

For the improvement of electrical properties of lead zirconate titanete (PZT) thick films, it is important to lower the firing temperature of thick films. It is also effective to fabricate the films through one time of coating and drying process before crystallization annealing. In this study, we used PZT solution with PZT amorphous powder as the raw material and fabricated the PZT films by the sol–gel method. We successfully fabricated the PZT thick films without macro defects (cracks, pin holes) using this process.