Abstract
We demonstrated the size effect of BaTiO3 based ceramics using freestanding BaTiO3 thick films fabricated by the aerosol deposition (AD) method. Dense BaTiO3 thick films fabricated by the AD method were crystallized and detached from the SrTiO3 substrate by annealing treatment at 600ºC, and then the grain size was controlled by reannealing treatment at various temperatures. As a result, freestanding BaTiO3 thick films with various grain sizes from 24 to 170 nm were successfully obtained. Dielectric measurement indicated that the permittivity decreased with decreasing grain size in the range from 170 to 24 nm.
