Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2011
Session ID : 3H10
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The periodical structure control of ceramic thin film using monodisperse polystyrene as a template
*Ryo UsamiNaonori SakamotoKazuo ShinozakiHisao SuzukiNaoki Wakiya
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Abstract
A TiO2 thin film with a periodical hemispherical structure on a Si substrate is prepared using pulsed laser deposition (PLD) with close-packed monolayer polystyrene (PS) colloidal crystals as a template. Compared with conventional methods, which use a top-down approach, the route presented herein supports low-cost production of a periodic structure. The morphology of the film can be controlled by the geometry of the substrate in the PLD chamber.
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© The Ceramic Society of Japan 2011
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