Fabrication of transparent ZnO thin films by molecular precursor method

Abstract

ZnO thin film on glass substrates is a significant candidate as a transparent conductive electrode. It is known that its conductivity will be given from the zinc between lattices and an oxygen defect. We report here ZnO thin film fabrication on a glass substrate by molecular precursor method. ZnO precursor solution was prepared from a Zn complex of EDTA. Another type of precursor solution was newly prepared from the reaction of zinc formate with propylamine. By applying the solutions with spin-coating method, ZnO thin films were obtained by heat-treating of the precursor film on quartz glass substrate.