Annual Meeting of The Ceramic Society of Japan, 2012
Session ID : 1P161
Conference information
Fabrication and characterization of the nano fabricated resist tip for nano particle control
*Tsukasa YANAGITA, Tadachika NAKAYAMA, Takeshi FUJIHARA, Takeshi YOSHIMURA, Masayuki ISHII, Tsuneo SUZUKI, Hisayuki SUEMATSU, Koichi NIIHARA
Author information
Keywords:
resist tip,
nano particle control
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