Abstract
Pb(Mg1/3Nb2/3)O3 (PMN) thin films were prepared by Metal Organic Decomposition (MOD) method. It was investigated that the effects of Pb content, temperature of sintering, annealing or non-annealing, and facing or not during post annealing process on the crystallinity of PMN epitaxial thin films. The 10at%Pb-rich PMN film annealed at 973 K with facing on substrates indicated the better crystallinity than the films grown under another conditions.