Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2012
Session ID : 1P196
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Solid-phase Crystallization of Transparent Conducting Oxide (TCO) Thin Films Under Uniaxial Compression
*Geng Tan, Tsubasa Yamanoi, Hideo Oi, Masahiro Mita, Satoru Kaneko, Yumiko Miyake, Akifumi Matsuda, Mamoru Yoshimoto
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Keywords: Transparent Conducting Oxide Thin Films, Nanoimprint, Solid-phase Crystallization
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[in Japanese]
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© The Ceramic Society of Japan 2012
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