Abstract
Recently, vibration energy harvesting is receiving a considerable amount of interest. For the piezoelectric vibration energy harvester, the piezoelectrics with low dielectric permittivity and large piezoelectric coefficient are suitable to obtain high conversion efficiency. In this study, BiFeO3 is focused as one of the promising materials for piezoelectric energy harvester, because BiFeO3 has relatively low dielectric permittivity (~50). The piezoelectric properties of the BiFeO3 films with different crystal system and orientation were characterized. It was found that the (100) BiFeO3 films with rhombohedral structure have the largest effective transverse piezoelectric coefficient (e31,f) of -3.5C/m2.