Abstract
Epitaxial thin film of titanium oxyhydride ATiO3-xHx (A = Ba, Sr, Ca) were prepared by CaH2 reduction of epitaxial ATiO3 thin films deposited on a LSAT substrate. Secondary ion mass spectroscopy detected a substantial amount and uniform distribution of hydride within the film. As opposed to bulk BaTiO3-xHx, the electric resistivity of all the ATiO3-xHx films exhibited metallic temperature dependence, revealing that the titanium perovskite oxyhydrides are intrinsically metallic. Treatment with D2 gas results in hydride-deuteride exchange of the films. Combined with the materials' inherent high electronic conductivity, new mixed electron-hydride ion conductors may also be possible.