Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2012
Session ID : 2B26
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NO2 gas sensing property of Ti doped ZnFe2O4 epitaxial film.
*Yumi Arai, Soma Sato, Cross Jeffrey S., Tadashi Shiota, Osamu Sakurai, Kazuo Shinozaki, Takanori Kiguchi, Naoki Wakiya
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Keywords: epitaxial thin film, gas sensor, NOx, ZnFe2O4, Ti doped zinc ferrite
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Abstract
Epitaxial (111) Zn ferrite (ZFO) film with 50 nm thick was deposited on (001)YSZ substrate using KrF eximer laser PLD (pulsed laser deposition) apparatus. 0.1-10mol% Ti doped Zn ferrite (ZFTO) homo-epitaxial thin films with (111) orientation were deposited on ZFO buffered YSZ substrate as ZFTO/ZFO/YSZ structure. ZFO film on YSZ (ZFO/YSZ) showed higher electrical resistivity then the ZFTO/YSZ film. The resistance of the homo-epitaxial ZFTO/ZFO/YSZ film decreased with increasing the NO2 gas concentration. There was a good relationship between sensitivity and NO2 concentration in case of ZFTO(8nm)/ZFO(20nm)/YSZ film.
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© The Ceramic Society of Japan 2012
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