Abstract
High-capacitance MLCC technology road map always shows thinner dielectric and inner electrode layer to obtain higher capacitance with smaller case size. Thinner MLCC ceramic layer means smaller grain size of BaTiO 3, naturally milling and mixing of smaller BaTiO3 powder and/or the raw material using beads miller with smaller PSZ (partial stabilized zirconia) is indispensable. Conventional PSZ bead for mill is a sintered type. On the other hands, plasma process can fabricate nano-sized powder effectively. We characterized the two different types of 50um PSZ beads by HR-STEM (high-resolution scanning transmission electron microscopy).
