Abstract
Piezoelectric actuator devices become increasingly important with widespread use of mechatronics devices. We propose a lead-free (K,Na)NbO3-based multilayer ceramic with nickel inner electrodes for piezoelectric actuator devices. In this study, the reduction resistance of (K,Na)NbO3 system was clarified to be cofired with base metal nickel inner electrodes. As a result, sufficiently high electric resistivity was obtained for the (K,Na)NbO3-based composition in reducing firing. The d33 constant was 160 pC/N and the Curie temperature was 260 degree Celsius. A multilayer specimen with nickel inner electrodes was fabricated. Its normalized electric-field-induced thickness strain was 360 pm/V.
