Nanocoating Lithography Technique

Abstract

This paper describes nanocoating lithography technique with factors of high-throughput and high-resolution. Nanocoating lithography technique is a nanofabrication technique based on nanocoating of thin film on a template and its selective removal. This technique enables us to fabricate metal nanostructure arrays with shapes of nanofins or nanopillars with relatively little efforts. Metal nanostructures fabricated by nanocoating lithography have electrical conductivity and show plasmon resonance under specific wavelength range depending on their size and shape. In addition to the nanocoating lithography processes, electrical and optical applications of metal nanostructure fabricated nanocoating lithography technique will be discussed．