Proceedings of JSPE Semestrial Meeting
2002 JSPE Autumn Meeting
Session ID : E08
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Host: The Japan Society for Precision Engineering

Ultra-micro Cutting of Monocystal Si -Comparison of Cutting Force Between in Air and in Vacuum-
*Yanjie Liu, dazhang Hu, Nobuhiro Takezawa, Toyosirou Inamura
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Keywords: micro-cutting, monocrystal Si, diamond tool, vacuum
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[in Japanese]
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© 2002 The Japan Society for Precision Engineering
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