2002 JSPE Autumn Meeting
Session ID : F83
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Host: The Japan Society for Precision Engineering
Development of an ultra-precision stage driven by the non-resonance type ultrasonic motor -(8th Report)-
*Hiroyuki Hashiguchi, Kouji Kosaka, Yoshiya Egashira, Taishi Endou, Keiichi Nagamoto, Tetsuya Kosaka, Takahiro Yamakawa, Akira Nakada, Hiroshi Kubota
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