Proceedings of JSPE Semestrial Meeting
2002 JSPE Autumn Meeting
Session ID : G69
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Host: The Japan Society for Precision Engineering

An Investigation about Friction Material for Ultra-High Vacuum Compatible Rotary Feedthrough Using Ultrasonic Motor
*Shunichi Takahashi, Takeshi Morita, Hajime Asama, Toshiki Niino
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Keywords: Ultra-High Vacuum, Ultrasonic Motor, Rotary Feedthrough, Friction Material
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[in Japanese]
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© 2002 The Japan Society for Precision Engineering
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