Proceedings of JSPE Semestrial Meeting
2002 JSPE Autumn Meeting
Session ID : H33
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Host: The Japan Society for Precision Engineering

Micropatterning of diamond films with metal organic acid mask
*[in Japanese], [in Japanese], [in Japanese], [in Japanese], [in Japanese]
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Keywords: diamond film, electron beam lithography, micropatterning, oxide mask, metal naphthenate, metal octylate
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Abstract
[in Japanese]
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© 2002 The Japan Society for Precision Engineering
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