2002 JSPE Autumn Meeting
Session ID : H80
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Host: The Japan Society for Precision Engineering
Dynamic Simulation of CMP Process Using FEM with Repetitively Modified Mesh -Effect of Pad Cros-Sectional Profile on CMP Performance-
*Shigeki Takeshita, Takaaki Usui, Tatsutoshi Suzuki, Nobuhiro Takezawa, Toyoshiro Inamura
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