Proceedings of JSPE Semestrial Meeting
2002 JSPE Autumn Meeting
Session ID : I50
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Host: The Japan Society for Precision Engineering

Generation of nano-texture surface by Si-MBE
*Koutaro Fujiyama, Yuji Furukawa, Nobuyuki Moronuki, Akira Kakuta, Arata Kaneko
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Keywords: nano-texture, mesa-pattern, self-organization
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[in Japanese]
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© 2002 The Japan Society for Precision Engineering
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