2002 JSPE Autumn Meeting
Session ID : I81
Conference information
Host: The Japan Society for Precision Engineering
Profile deformation of thin SiC mirror during ELID grinding process
*Yutang Dai, Hiroaki Eto, Hitoshi Ohmori, Weimin Lin, Toru Suzuki, Nobuhide Ito, Hideo Tashiro, Akitake Makinouchi
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