2002 JSPE Autumn Meeting
Session ID : K22
Conference information
Host: The Japan Society for Precision Engineering
Single-crystal diamond with reactive ion-beam assisted chemical etching and Evaluation of single-crystal diamond with ion-beambombardment damage using XPS
Keywords:
single-crystal diamond,
X-ray Photoelectron Spectroscopy,
Reactive Ion-beam Chemical-Assisted Etching,
ion-beam bombardment damage
Details
